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L10-FePt ordered alloy thin films with (001) preferential orientation were fabricated by annealing Fe/Pt/X (X: Cu and Au) trilayers to reduce Curie temperature and ordering temperature. FePtCu film exhibited Curie temperature of around 280°C and steep change of perpendicular coercivity to a measurement temperature |dHc⊥/dT| at around 200°C. In addition, process temperature decreased to 500°C by adding Au atom to FePt film and perpendicular coercivity was as high as 5.8kOe even though annealing temperature was as low as 500°C

Effect of third element for FePt ordered alloy thin films with perpendicular magnetic anisotropy fabricated from Fe/Pt/X trilayer