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A non-contact self-running ultrasonically levitated 2D stage is discussed. In our previous work, the ultrasonically levitated linear slider for a self-running sliding stage was investigated. When the flexural vibration mode is excited along the slider, the slider on the flat substrate can be levitated due to the acoustic radiation force from the own vibrating plate. The slider can move the same direction as the acoustic streaming induced along the air gap. The proposed 2D stage was fabricated from a rectangular aluminum plate and the four vibrating plates were integrated. The vibrating plates are cantilever-type and the PZT elements are attached on the fixed-end of the vibrating plates. The 2D stage has four our previous linear sliders, two pairs both in x and y directions. To isolate the performances of each vibrating plate, the four vibrating plates with different lengths were designed. The 2D stage could be levitated at the several frequencies from 60 to 70 kHz. By changing the driving frequency, the moving direction of the stage could be controlled. The maximum thrust of 5.3 mN could be obtained at 71 kHz with 70 Vpp

A self-running ultrasonically levitated 2D stage using flexural vibrating plates