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This paper presents the design, fabrication, and experimentalcharacterization of monolithically integrated p-n junction InGaN/GaN multiplequantum well diodes (MQWDs) and suspended waveguides. Suspended MQWDs can beused as transmitters and receivers simultaneously, and suspended waveguides areused for light coupling to create an in-plane visible light communicationsystem. Compared to the waveguide with separation trench, the calculated totallight efficiency is increased from 18% to 22% for the continuous waveguide. TheMQWDs are characterized by their typical current-voltage performance, and thepulse excitation measurements confirm that the InGaN/GaN MQWDs can achieve thelight emission and photodetection at the same time. The photocurrentmeasurements indicate that the photocurrent is modulated by a bias voltage andthat the photons are being supplied from another transmitter. An experimentaldemonstration is presented showing that the proposed device works well forin-plane full-duplex communication using visible light.

Simultaneous light emission and detection of InGaN/GaN multiple quantum well diodes for in-plane visible light communication on a chip