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Hydrogen loss from a-SiNx:H films under irradiation with 100 MeV Ag7+ ionsusing elastic recoil detection analysis (ERDA) experiments is reported. Theresults are explained under the basic assumptions of the molecularrecombination model. The ERDA hydrogen counts are composed of two distincthydrogen desorption processes, limited by rapid molecular diffusion in theinitial stages of irradiation, and as the fluence progresses a slow processlimited by diffusion of atomic hydrogen takes over. Which of the aforesaidprocesses dominates, is determined by the continuously evolving Hydrogenconcentration within the films. The ERDA measurements were also carried out forfilms treated with low temperature (300 degrees centigrade) hydrogen plasmaannealing (HPA). The HPA treated films show an improved diffusion of atomichydrogen, resulting from healing of weak bonds and passivation of danglingbonds. Further, upon HPA, films also show evolution of hydrogen withsignificantly higher counts, at advanced fluences, relative to the as-depositedfilms. These results indicate the potential of HPA towards improved H retentionin a-SiNx:H films. The study distinguishes clearly the presence of twodiffusion processes in a-SiNx:H whose diffusion rates differ by an order ofmagnitude, with hydrogen radicals not being able to diffuse beyond ~1 nm fromthe point of their creation. The results are very relevant for the passivationapplications of a-SiNx:H

Hydrogen loss and its improved retention in hydrogen plasma treated a-SiNx:H films: ERDA study with 100 MeV Ag7+ ions