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The Silicon Electron Multiplier (SiEM) sensor is a novel sensor concept thatenables charge multiplication by high electric fields generated by embeddedmetal electrodes within the sensor bulk. Metal assisted chemical etching(MacEtch) in gas phase with platinum as a catalyst has been used to fabricatetest structures consisting of vertically aligned silicon pillars and strips ontop of a silicon bulk. The pillars exceed 10 $\mu m$ in height with a diameterof 1.0 $\mu m$ and are arranged as a hexagonal lattice with a pitch of 1.5 $\mum$. Electrical characterisations through current $-$ voltage measurementsinside a scanning electron microscope and a climate chamber have demonstratedthat the MacEtch process is compatible with active media and p-n junctions.

nuclear instruments and methods in physics research. section a, accelerators, spectrometers, detectors and associated equipment/nuclear instruments and methods in physics research. section a, accelerators, spectrometers, detectors and associated equipment

Fabrication of a Silicon Electron Multiplier sensor using Metal Assisted Chemical Etching and its characterisation