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A cluster imaging technique for Transmission Electron Microscopy with adirect detection CMOS pixel sensor is presented. Charge centre-of-gravityreconstruction for individual electron clusters improves the spatial resolutionand thus the point spread function. Data collected with a CMOS sensor with 9.5micron pixels show an improvement of a factor of two in point spread functionto 2.7 micron at 300 keV and of a factor of three in the image contrast,compared to traditional bright field illumination.

Cluster Imaging with a Direct Detection CMOS Pixel Sensor in Transmission Electron Microscopy