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We present a novel technique based on an ensemble of Nitrogen-Vacancy (NV)centers in diamond to perform Magnetic Current Imaging (MCI) on an IntegratedCircuit (IC). NV centers in diamond allow measuring the three components of themagnetic fields generated by a mA range current in an IC structure over a fieldof 50 x 200 {\mu}m^2 with sub-micron resolution. Vector measurements allowusing a more robust algorithm than those used for MCI using Giant MagnetoResistance (GMR) or Superconducting Quantum Interference Device (SQUID) sensorsand it is opening new current reconstruction prospects. Calculated MCI fromthese measurements shows a very good agreement with theoretical current path.Acquisition time is around 10 sec, which is much faster than scanningmeasurements using SQUID or GMR. The experimental set-up relies on a standardoptical microscope, and the measurements can be performed at room temperatureand atmospheric pressure. These early experiments, not optimized for IC, showthat NV centers in diamond could become a real alternative for MCI in IC.

Nitrogen-Vacancy Centers in Diamond for Current Imaging at the Redistributive Layer Level of Integrated Circuits