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Irradiation of cuprate high-$T_c$ superconductors with light ions of moderateenergy creates point defects that lead to a reduction or full suppression ofthe critical temperature. By shaping the ion flux with a stencil mask,nanostructures for emerging superconducting electronics can be fabricated. The3-dimensional shape of such defect landscapes is examined, based oncalculations of full collision cascades and atom displacements. A relationbetween the calculated defect density and experimental values of the criticaltemperature $T_c$ in thin YBa$_2$Cu$_3$O$_{7-\delta}$ films is etablished thatallows to determine the distribution of local $T_c$'s and its 3-dimensionalvisualization. The results confirm that, using 75 keV He$^+$ ion irradiationand a stencil mask, well-defined patterns of non-superconducting material inthe superconducting matrix can be produced with low blurring.

Nano-patterning of cuprate superconductors by masked He$^+$ ion irradiation: 3-dimensional profiles of the local critical temperature