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We present results on the fabrication of chemiresistive nanocomposite NiO:Pdhydrogen sensors, which are able to detect hydrogen concentrations as low as300 ppb in air, operating at temperatures in the 115-145 C range. Thin NiOfilms were deposited by radio frequency magnetron sputtering on silicon andquartz substrates and their structural and morphological properties werecharacterized. Pd nanoparticles were added on the NiO surface via pulsed laserdeposition and the films were tested as hydrogen sensors before and after Pddeposition. The presence of Pd nanoparticles improved the sensor performance,leading to the detection of hydrogen concentrations at sub-ppm levels.Moreover, the response time of the sensors decreased by a factor between twoand four.

Nanocomposite NiO:Pd hydrogen sensors with sub-ppm detection limit and low operating temperature