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In order to provide an alternative for the vertical axis calibration of stylus instruments which is usually performed based on step height standards, a new measurement standard geometry for the calibration of the linearity and research on its manufacturing is needed. For the manufacturing of these geometric measurement standards there is, according to the type of the measurement standard, a broad range of manufacturing processes that can be applied. New measurement standards for the roughness calibration were developed at the University of Kaiserslautern and an ultra-precision turning process was chosen for its manufacturing. The paper presents a feasibility study of the chosen manufacturing process. The aim of the investigations is to present the development of the standard and the qualification of the ultra-precision turning process for the manufacturing of calibration standards. An examination was performed in order to characterize the influences of different process parameters on the quality of the manufactured roughness standard

Manufacturing of new roughness standards for the linearity of the vertical axis – Feasibility study and optimization