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We propose a new label-free ultrasonic sensor, which comprises a slotwave-guide and double silicon-on-insulator (SOI) slot micro-ring resonators.The all-optical sensors do not suffer from electromagnetic interference. Wechoose to integrate a silicon slot double micro-ring (SDMR) resonators in anacoustically resonant membrane. Optimization of the several key structuralparameters is investigated to achieve the mode-field distributions oftransmission spectrum based on Comsol Multiphysics software. Our numericalstudies show that the proposed ultrasonic sensor offers higher sensitivity anda larger detection frequency range than conventional piezoelectric basedultrasound transducer. For a SDMR system with an area of 15um*30um, sensitivityas high as 2453.7mv/kpa, and over a bandwidth range of 1-150MHz. Thesensitivity value is 36 times higher than that of single slot micro-ringultrasonic sensor. The theoretical-factor of the SDMR can be approximately1.24*10^6 with bending radius of 5um. The investigation on the SDMR system is avaluable exploration of the photo-acoustic microscopy for the ultra-high Qfactor and large frequency range.

Sensitive label-free and compact ultrasonic sensor based on double silicon-on-insulator slot micro-ring resonators