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Atom probe tomography (APT) is extensively used to measure the localchemistry of materials. Site-specific preparation via a focused ion beam (FIB)is routinely implemented to fabricate needle-shaped specimens with an endradius in the range of 50 nm. This preparation route is sometimes supplementedby transmission Kikuchi diffraction (TKD) to facilitate the positioning of aregion of interest sufficiently close to the apex. Irradiating the specimenwith energetic electrons and ions can lead to the generation of vacancies andeven amorphization of the specimen. These extrinsically created vacanciesbecome crucial for probing the hydrogen or deuterium distribution since theyact as a strong trap. Here, we investigated the feasibility of site-specificpreparation of a two-phase medium-Mn steel containing austenite (fcc) andferrite (bcc). Following gaseous charging of APT specimens in deuterium (D2),clusters enriched by up to 35 at.% D, are imaged after Pt deposition,conventional Ga-FIB preparation, and TKD conducted separately. These D-richclusters are assumed to arise from the agglomeration of vacancies acting asstrong traps. By systematically eliminating these preparation-induced damages,we finally introduce a workflow allowing for studying intrinsic traps for H/Dinherent to the material.

Optimizing site-specific specimen preparation for Atom Probe Tomography by using hydrogen for visualizing radiation-induced damage