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This paper presents an atomic force microscopy (AFM) tip-based nanomachining method to fabricate periodic nanostructures. This method relies on combining the topography generated by machined grooves with the topography resulting from accumulated pile-up material on the side of these grooves. It is shown that controlling the distance between adjacent and parallel grooves is the key factor in ensuring the quality of the resulting nanostructures. The presented experimental data show that periodic patterns with good quality can be achieved when the feed value between adjacent scratching paths is equal to the width between the two peaks of material pile-up on the sides of a single groove. The quality of the periodicity of the obtained nanostructures is evaluated by applying one- and two-dimensional fast Fourier transform (FFT) algorithms. The ratio of the area of the peak part to the total area in the normalized amplitude–frequency characteristic diagram of the cross-section of the measured AFM image is employed to quantitatively analyze the periodic nanostructures. Finally, the optical effect induced by the use of machined periodic nanostructures for surface colorization is investigated for potential applications in the fields of anti-counterfeiting and metal sensing.

Fabrication of Periodic Nanostructures Using AFM Tip-Based Nanomachining: Combining Groove and Material Pile-Up Topographies