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In this paper a method is presented to accurately and readily measure the interstitial oxygen concentration in silicon. This method relies on the modification of the Si resistivity after the generation of some oxygen-based Thermal Donors. The method is made very accurate due to the strong dependence of the thermal donors formation rate on the interstitial oxygen concentration. The presented procedure is non destructive and only requires a resistivity measurement setup and a standard 450°C air furnace. Very high spatial resolution mappings can be achieved using up-to-date resistivity measurement tools

A Fast and Easily Implemented Method for Interstitial Oxygen Concentration Mapping Through the Activation of Thermal Donors in Silicon.