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Due to their outstanding mechanical properties, diamond and diamond-likematerials find significant technological applications ranging fromwell-established industrial fields (cutting tools, coatings, etc.) to moreadvanced mechanical devices as micro- and nano-electromechanical systems. Theuse of energetic ions is a powerful and versatile tool to fabricatethree-dimensional micro-mechanical structures. In this context, it is ofparamount importance to have an accurate knowledge of the effects ofion-induced structural damage on the mechanical properties of this material,firstly to predict potential undesired side-effects of the ion implantationprocess, and possibly to tailor the desired mechanical properties of thefabricated devices. We present an Atomic Force Microscopy (AFM)characterization of free-standing cantilevers in single-crystal diamondobtained by a FIB-assisted lift-off technique, which allows a determination ofthe Young's modulus of the diamond crystal after the MeV ion irradiationprocess concurrent to the fabrication of the microstructures, and subsequentthermal annealing. The AFM measurements were performed with the beam-bendingtechnique and show that the thermal annealing process allows for an effectiverecovery of the mechanical properties of the pristine crystal.

Characterization of the recovery of mechanical properties of ion-implanted diamond after thermal annealing