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In atom probe tomography (APT), accurate reconstruction of the spatialpositions of field evaporated ions from measured detector patterns depends upona correct understanding of the dynamic tip shape evolution and evaporation lawsof component atoms. Artifacts in APT reconstructions of heterogeneous materialscan be attributed to the assumption of homogeneous evaporation of all theelements in the material in addition to the assumption of a steady statehemispherical dynamic tip shape evolution. A level set method based specimenshape evolution model is developed in this study to simulate the evaporation ofsynthetic layered-structured APT tips. The simulation results of the shapeevolution by the level set model qualitatively agree with the finite elementmethod and the literature data using the finite difference method. Theasymmetric evolving shape predicted by the level set model demonstrates thecomplex evaporation behavior of heterogeneous tip and the interface curvaturecan potentially lead to the artifacts in the APT reconstruction of suchmaterials. Compared with other APT simulation methods, the new method providessmoother interface representation with the aid of the intrinsic sub-gridaccuracy. Two evaporation models (linear and exponential evaporation laws) areimplemented in the level set simulations and the effect of evaporation laws onthe tip shape evolution is also presented.

Simulation of Heterogeneous Atom Probe Tip Shapes Evolution during Field Evaporation Using a Level Set Method and Different Evaporation Models