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Thin Cr films 28-nm thick deposited on glass substrates were processed byscanning low-intensity femtosecond laser pulses with energy well belowsingle-pulse damage threshold. Two types of laser-induced periodic surfacestructures (LIPSS) were produced, depending on the scanning velocity, (1)parallel to laser light polarization with periodicity somewhat smaller thanlaser wavelength and (2) perpendicular to polarization with spatial period muchsmaller than wavelength. All structures are formed as protrusions above theinitial film surface and exhibit a high degree of oxidation. To explainformation of the LIPSS and their conversion from one to another type, arigorous numerical approach for modeling surface electromagnetic waves inthin-film geometry has been developed, which takes into account the change ofoptical properties of material due to laser-induced oxidation and porosity. Theapproach addresses the multiplicity of electromagnetic modes allowed for thinfilms. It has been found that the low spatial frequency LIPSS parallel to laserpolarization, which are formed at low scanning velocities, are well describedby the Sipe theory for surfaces of low roughness. The SEW mode responsible forhigh spatial frequency LIPSS formation at high scanning velocities has beenidentified. The mechanisms of optical feedback and transformation between typesof LIPSS with scanning velocity have been proposed.

LIPSS on thin metallic films: New insights from multiplicity of laser-excited electromagnetic modes and efficiency of metal oxidation