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Polycrystalline diamond films with systematic change in microstructure thatvaries from microcrystalline to nanocrystalline structure are synthesized on Siby hot filament chemical vapor deposition. The morphology and structuralproperties of the grown diamond films are analyzed using field emissionscanning electron microscope (FESEM), atomic force microscope (AFM), X-raydiffraction and Raman spectroscopy. The average roughness and grain size of thediamond films decrease with increase in CH4 to H2 ratio from 0.5 to 3 %. Also,structural disorder in these diamond films increases with decrease in grainsize as evidenced from Raman spectroscopy. The coefficient of friction (CoF) isfound to be very low for all the films. However, the average CoF is found toincrease from 0.011 +/-0.005 to 0.03 +/- 0.015 as the grain size decrease from~ 1 micron down to ~20 nm. Post analysis of wear track by FESEM, AFM basednanoscale friction and Raman spectroscopy reveal that microcrystalline diamondundergoes shear induced amorphization with negligible wear rate whilenanocrystalline diamond films undergo shear induced plastic deformation withoutamorphization. A comprehensive mechanism for the observed CoF is discussed inthe framework of microstructure, structural disorder and shear inducedtribo-chemical reactions at the sliding interface.

Role of microstructure and structural disorder on tribological properties of polycrystalline diamond films