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An extended study on an advanced method for the cleaning of carboncontaminations on large optical surfaces using a remote inductively coupled lowpressure RF plasma source (GV10x downstream asher) is reported in this work.Technical as well as scientific features of this scaled up cleaning process areanalyzed, such as the cleaning efficiency for different carbon allotropes(amorphous and diamond-like carbon) as a function of feedstock gas composition,RF power (ranging from 30 to 300W), and source-object distances (415 to 840mm). The underlying physical phenomena for these functional dependences arediscussed.

RF plasma cleaning of optical surfaces: A study of cleaning rates on different carbon allotropes as a function of RF powers and distances