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We demonstrate an atomic force microscopy based method for estimation ofdefect density by identification of threading dislocations on a non-flatsurface resulting from metamorphic growth. The discussed technique can beapplied as an everyday evaluation tool for the quality of epitaxial structuresand allow for cost reduction, as it lessens the amount of the transmissionelectron microscopy analysis required at the early stages of projects.Metamorphic structures with low surface defectivities (below 106) weredeveloped successfully with the application of the technique, proving itsusefulness in process optimisation.

Evaluation of defect density by top-view large scale AFM on metamorphic structures grown by MOVPE