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Laser induced periodic surface structures (LIPSS) are formed by multipleirradiation of femtosecond laser on a silicon target. In this paper, we focusand discuss the surface plasmon polariton mechanism by an analysis of transientphase-matching conditions in Si on the basis of a single pulse experiment andnumerical simulations. Two regimes of ripple formation mechanisms at low numberof shots are identified and detailed. Correlation of numerical and experimentalresults is good.

Formation of femtosecond laser induced surface structures on silicon : insights from numerical modeling and single pulse experiments