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We report on polarization combining 2D grating couplers (2D GCs) on amorphousSi:H, fabricated in the backend of line of a photonic BiCMOS platform. The 2DGCs can be used as an interface of a hybrid silicon photonic coherenttransmitter, which can be implemented on bulk Si wafers. The fabricated 2D GCsoperate in the telecom C-band and show an experimental coupling efficiency of-5 dB with a wafer variation of +/-1.2 dB. Possibilities for efficiencyenhancement and improved performance stability in future design generations areoutlined and extension towards O-band devices is investigated as well.

Dual-polarization multiplexing amorphous Si:H grating couplers for silicon photonic transmitters in the photonic BiCMOS backend of line