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We report the application of palladium nanoparticles and thin films for hydrogen sensor. Electrochemically grown palladium particles with spherical shapes deposited on Si substrate and sputter deposited Pd thin films were used to detect hydrogen at room temperature. Grain size dependence of H(2) sensing behavior has been discussed for both types of Pd films. The electrochemically grown Pd nanoparticles were observed to show better hydrogen sensing response than the sputtered palladium thin films. The demonstration of size dependent room temperature H(2) sensing paves the ways to fabricate the room temperature metallic and metal-metal oxide semiconductor sensor by tuning the size of metal catalyst in mixed systems. H(2) sensing by the Pd nanostructures is attributed to the chemical and electronic sensitization mechanisms.

Pd Nanoparticles and Thin Films for Room Temperature Hydrogen Sensor