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Background: Application of patterns to enable high-resolution Digital Image Correlation (DIC) at the small scale ( μ  m / nm ) is known to be very challenging as techniques developed for the macro- and mesoscale, such as spray painting, cannot be scaled down directly. Moreover, existing nano-patterning techniques all rely on harsh processing steps, based on high temperature, chemicals, physical contact, liquids, and/or high vacuum, that can easily damage fragile, small-scale, free-standing and/or hygro-sensitive specimens, such as MEMS or biological samples. Objective: To present a straightforward, inexpensive technique specially designed for nano-patterning highly delicate specimens for high-resolution DIC. Methods: The technique consists in a well-controlled nebulized micro-mist, containing predominantly no more than one nanoparticle per mist droplet. The micro-mist is subsequently dried, resulting in a flow of individual nanoparticles that are deposited on the specimen surface at near-room temperature. By having single nanoparticles falling on the specimen surface, the notoriously challenging task of controlling nanoparticle-nanoparticle and nanoparticle-surface interactions as a result of the complex droplet drying dynamics, e.g., in drop-casting, is circumvented. Results: High-quality patterns are demonstrated for a number of challenging cases of physically and chemically sensitive specimens with nanoparticles from 1  μ  m  down to 50  nm  in diameter. It is shown that the pattern can easily be scaled within (and probably beyond) this range, which is of special interest for micromechanical testing using  in-situ  microscopic imaging techniques, such as high-magnification optical microscopy, optical profilometry, atomic force microscopy, and scanning electron microscopy, etc. Conclusions: Delicate specimens can conveniently be patterned at near-room temperature (   $\sim $  ∼ 37  ∘ C), without exposure to chemicals, physical contact or vacuum, while the pattern density and speckle size can be easily tuned.

Cool, Dry, Nano-scale DIC Patterning of Delicate, Heterogeneous, Non-planar Specimens by Micro-mist Nebulization