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The ultrasonic backscattering technique is employed for the characterization of a 2D surface corrugation which is superposed on or hidden on the backside of a polycarbonate sample. In contrast to previous studies where the incident angle at well-defined and a-priori known symmetry orientations of the surface structure is varied in order to extract the characteristic periodicities, the backscatter polar scan method incorporates an additional variation of the orientation of the vertical insonification plane within the experimental measurement protocol. As such, the characteristic periodicities as well as the surface symmetries can be extracted without any prior knowledge of the surface structure. As a benefit compared to optical methods, we have also validated this extended methodology for the investigation of a 2D subsurface corrugation. Although the diffraction conditions do not change in comparison with a visible 2D surface corrugation, we remark that additional attention is required in the sense that the elastic properties of the substrate material put further restrictions to the range of applicable ultrasonic frequencies. The characterized periodicities and symmetries are in excellent agreement with the design parameters of the (hidden) 2D surface grating

Ultrasonic Characterizaion of Subsurface 2D Corrugation