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We have measured the interaction between superfluid $^3$He-B and amicro-machined goalpost-shaped device at temperatures below $0.2\,T_c$. Themeasured damping follows well the theory developed for vibrating wires, inwhich the Andreev reflection of quasiparticles in the flow field around themoving structure leads to a nonlinear frictional force. At low velocities thedamping force is proportional to velocity while it tends to saturate for largerexcitations. Above a velocity of 2.6$\,$mms$^{-1}$ the damping abruptlyincreases, which is interpreted in terms of Cooper-pair breaking.Interestingly, this critical velocity is significantly lower than reported withother mechanical probes immersed in superfluid $^3$He. Furthermore, we reporton a nonlinear resonance shape for large motion amplitudes that we interpret asan inertial effect due to quasiparticle friction, but other mechanisms couldpossibly be invoked as well.

Probing Bogoliubov quasiparticles in superfluid $^3$He with a 'vibrating-wire like' MEMS device