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The sensitivity of microwave kinetic inductance detectors (MKIDs) based oncoplanar waveguides (CPWs) needs to be improved by at least an order ofmagnitude to satisfy the requirements for space-based terahertz astronomy. Ouraim is to investigate if this can be achieved by reducing the width of the CPWto much below what has typically been made using optical lithography (> 1{\mu}m). CPW resonators with a central line width as narrow as 300 nm were madein NbTiN using electron beam lithography and reactive ion etching. In asystematic study of quarter-wave CPW resonators with varying widths it is shownthat the behavior of responsivity, noise and power handling as a function ofwidth continues down to 300 nm. This encourages the development of narrow KIDsusing Al in order to improve their sensitivity.

Power Handling and Responsivity of Submicron Wide Superconducting Coplanar Waveguide Resonators