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We have successfully fabricated barium titanate (BaTiO3) films on Si (100) and Pt(111)/Ti/SiO2/Si substrates using the polyol thermal decomposition (PTD) process by spin-coating technique. In PTD process, we confirmed that the crystalline oxycarbonate Ba2Ti2O5CO3 films were directly formed as a consequence of evaporation of polyol precursor solution prepared simply by mixing metal chlorides and ethylene glycol, and then converting them into crystalline BaTiO3 films through thermal decomposition at >500 °C. This feature makes it possible to grow densely packed and crack-free BaTiO3 films as thin as 70 Å per cycle. Although PTD is described here for a complex metal-oxide film of BaTiO3, other simple and complex metal-oxide thin films with high-dielectric constant materials are also likely to be suitable for deposition with accurate control of film thickness and composition using the polyol precursor solutions.

Ultrathin barium titanate films by polyol thermal decomposition process