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We have developed and characterized two novel micro flow sensors based onmeasuring the electrical impedance of the interface between the flowing liquidand metallic electrodes embedded on the channel walls. These flow sensors arevery simple to fabricate and use, are extremely compact and can easily beintegrated into most microfluidic systems. One of these devices is a microporewith two tantalum/platinum electrodes on its edges; the other is a microchannel with two tantalum /platinum electrodes placed perpendicular to thechannel on its walls. In both sensors the flow rate is measured via theelectrical impedance between the two metallic electrodes, which is theimpedance of two metal-liquid junctions in series. The dependency of themetal-liquid junction impedance on the flow rate of the liquid has beenstudied. The effects of different parameters on the sensor's outputs and itsnoise behavior are investigated. Design guidelines are extracted and applied toachieve highly sensitive micro flow sensors with low noise.

Method for Flow Measurement in Microfluidic Channels Based on Electrical Impedance Spectroscopy