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A novel propulsion method suitable for micromachining is presented that takes advantage of Helmholtz resonance, acoustic streaming, and eventually flow entrainment and thrust augmentation. In this method, an intense acoustic field is created inside the cavity of a Helmholtz resonator. Flow velocities at the resonator throat are amplified by the resonator and create a jet stream due to acoustic streaming. These jets are used to form a propulsion system. In this paper a system hierarchy incorporating the new method is described and the relevant governing equations for the Helmholtz resonator operation and acoustic streaming are derived. These equations can predict various device parameters such as cavity pressure amplitude, exit jet velocity and generated thrust. In a sample embodiment, an electrostatic actuator is used for generation of the initial acoustic field. The relevant design parameters for the actuator are discussed and an equivalent circuit model is synthesized for the device operation. The circuit model can predict the lowest order system resonance frequencies and the small signal energy conversion efficiency. A representative resonator performance is simulated and it is shown that velocities above 16 m/s are expected at jet nozzles. The calculated delivered thrust by this resonator with 0.7 μm diaphragm displacement amplitude is 3.3 μN at the resonance frequency

Electrostatically driven synthetic microjet arrays as a propulsion method for micro flight