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In this paper, we present the first measurements of the partial spatial coherence of the EUV emission from xenon plasma in laser-plasma source, based on a double stream gas puff target. The Young double slit approach was employed to measure complex coherence factor of the EUV Xe emission at 13.5-nm wavelength in two orthogonal directions. The radius of coherence of ~60 μm was estimated at the distance of 2.1 m from the source. The number of coherently emitted photons was sufficient to demonstrate coherent imaging. Using partially coherent radiation from such source Gabor EUV holography was successfully demonstrated.

Spatial coherence measurements of the EUV emission from laser-plasma source based on xenon/helium gas puff target