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We report on fabrication of on-chip calcium fluoride (CaF2) microdiskresonators using water-assisted femtosecond laser micromachining. Focused ionbeam (FIB) milling is used to create ultra-smooth sidewalls. The quality(Q)-factors of the fabricated microresonators are measured to be 4.2x10^4 atwavelengths near 1550 nm. The Q factor is mainly limited by the scattering fromthe bottom surface of the disk whose roughness remains high due to thefemtosecond laser micromachining process. This technique facilitates formationof on-chip microresonators on various kinds of bulk crystalline materials,which can benefit a wide range of applications such as nonlinear optics,quantum optics, and chip-level integration of photonic devices.

Fabrication of three-dimensional microdisk resonators in calcium fluoride by femtosecond laser micromachining