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A new, scalable process chain for the fabrication of curved micro-structured metallic tools is developed and evaluated. Arrays of arrows, circles, semicircles and rings with final lateral dimensions of 124 to 819 µm are realised on the tools and successfully transmitted in one process step to stainless steel workpieces with a functional area of 6.5 cm 2  using pulsed electrochemical machining. Photolithography-etching or micromilling are applied as initial micro-structuring processes, resulting in micro-structured master forms. These forms are copied into reusable silicon forms. This is followed by epoxy casting and electroforming to obtain the final tools. The tools are made of Nickel and have a diameter of 34 mm. Whilst micromilling, photolithography, silicon casting, epoxy casting and electroforming copy the structures very precisely, the wet etching process induces a widening of the dimensions due to the isotropic character of the process. The advantage of the process chain is the reusability of the master as well as of the silicone forms, which can be copied very precisely and easily with scalable processes to get precision tools with relatively large micro-structured areas. The reusability of the forms makes the fabrication of micro-structured tools relatively cost-efficient. The use of photolithography as the initial structuring process enables the generation of arbitrary, user-defined geometries for the micro-structures on the tool surface. The process chain described has the potential to fabricate lateral structure sizes on tools down to one micrometre.

Fabrication of micro-structured tools for the production of curved metal surfaces by pulsed electrochemical machining