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An inductively coupled (ic) radio-frequency (rf) stabilized argon plasma was generated in a quartz tube using a 7 MHzrf generator. The electrical and thermal powers were measured and the efficiency of energy conversion was computed. The results indicate that for a constant power input, there is an optimum argon flow rate for which maximum energy conversion efficiency occurs.

Parametric study of the electrical to thermal power conversion in an inductively coupledrf plasma torch