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Part 4: Metrology and Quality ControlInternational audienceThis paper describes accuracy measurement method for high resolution miniature robot manipulators. The robot itself, measuring method and the results are presented. Parallel kinematic robot structures have by now seen as the most promising, due to their simpler and stiffer structure and easier miniaturisation. A robot using the direct drive method and direct high resolution feedback has been studied. The accuracy measurement for such robot is not straightforward because of the sub micrometre accuracy requirements and robots incapability to carry any measurement object or sensor. New kind of method is presented in this paper. It bases on the use of non-touching optical Coordinate Measuring Machine (CMM). Main advantage of presented method is its capability to traceable measurements and minimal interference with the measured robot. Results show that presented method is suitable for the accuracy measurements of the miniature devices

Accuracy Measurements of Miniature Robot Using Optical CMM