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International audienceThe measurement of features from the micro- andprecision manufacturing industries requires low uncertainties andnano-scale resolution. These are best delivered through ultra preciseco-ordinate measuring machines (CMMs). However, current CMMs are oftenrestricted by the relatively large and insensitive probes used. Thispaper focuses on the assembly challenges of a novel micro- CMM probe.The probe is comprised of a 70 μm glass sphere, attached to a solidtungsten-carbide shaft of diameter less than 100 μm, joined to apiezoelectric flexure structure. The assembly requirements are forpositional accuracy of ±0.5 μm, angle between the shaft and flexure of90°± 0.29° and that the components be undamaged by the process. Acombined Focused Ion Beam and Scanning Electron Microscope machine(FIB/SEM) with integrated nanoresolution manipulators was used. Theinvestigation has evaluated potential assembly and joining solutions,identified modifications to existing equipment and product design andproduced a set of prototypes

Utilisation of FIB/SEM Technology in the Assembly of an Innovative Micro-CMM Probe