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International audienceFlexible display has been attracting attention inthe research field of next generation display in recent years. Andpolymer is a candidate material for flexible displays as it takesadvantages including transparency, light weight, flexibility and so on.Rolling process is suitable and competitive process for the highthroughput of flexible substrate such as polymer. In this paper, wedeveloped a prototype of roll-to-flat (R2F) thermal imprint system forlarge area micro pattern replication process, which is one the keyprocess in the fabrication of flexible displays. Tests were conducted toevaluate the system feasibility and process parameters effect, such asflat mold temperature, loading pressure and rolling speed. 100 mm × 100mm stainless steel flat mold and commercially available polycarbonatesheets were used for tests and results showed that the developed R2Fsystem is suitable for fabrication of various micro devices with micropattern replication on large area

Development of the Roll Type Incremental Micro Pattern Imprint System for Large Area Pattern Replication