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From the background of microwave‐optomechanical experiments involving carbon nanotubes, the optimization of superconducting coplanar waveguide resonator devices is discussed. Two devices, one with unmodified geometry compared to previous work and one integrating several improvements, are lithographically built up step‐by‐step. After each step, the low‐temperature GHz transmission properties are retested. This allows to identify the impact of the fabrication and the geometry modification on the device properties. In addition, simplified circuit geometries are modeled numerically, confirming the experimental results and providing further insights for optimization.

Stepwise Fabrication and Optimization of Coplanar Waveguide Resonator Hybrid Devices