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A high-nitrogen-concentration diamond sample was subject to 200-keV electronirradiation using a transmission electron microscope. The optical andspin-resonance properties of the nitrogen-vacancy (NV) color centers wereinvestigated as a function of the irradiation dose up to 6.4\times1021 e-/cm2.The microwave transition frequency of the NV- center was found to shift by upto 0.6% (17.1 MHz) and the linewidth broadened with increasingelectron-irradiation dose. Unexpectedly, the measured magnetic sensitivity isbest at the lowest irradiation dose, even though the NV concentration increasesmonotonically with increasing dose. This is in large part due to a sharpreduction in optically-detected spin contrast at higher doses.

Electron Spin Resonance Shift and Linewidth Broadening of Nitrogen-Vacancy Centers in Diamond as a Function of Electron Irradiation Dose