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We present a coherent population trapping based scheme to attainsub-nanoscale resolution for atom localization, microscopy and lithography. Ourmethod uses three-level atoms coupled to amplitude modulated probe field andspatially dependent drive field. The modulation of the probe field allows us totap into the steep dispersion normally associated with electromagneticallyinduced transparency and offers an avenue to attain sub-nanometer resolutionusing just optical fields. We illustrate application of the techniques to thearea of microscopy and lithography and show how multilevel schemes offer thepossibility of improving resolution further.

Sub-nanoscale Resolution for Atom Localization, Lithography and Microscopy via Coherent Population Trapping