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We report on the fabrication and mid-infrared transmission properties offree-standing thin metal films, periodically patterned with holes at periodsdown to 2 microns and area of 3x3 mm2. Square grids were fabricated by electronbeam lithography and deep-etching techniques and display substrateless holes,with the metal being supported by a patterned dielectric silicon nitridemembrane. The mid-infrared transmission spectra of the substrateless griddisplay extraordinary transmission peaks and resonant absorption lines with aQ-factor up to 22. These spectral features are due to the interaction of theradiation with surface plasmon modes. The high transmittivity and the negativevalue of the dielectric constant at selected frequencies make our substratelessstructures ideal candidates for the fabrication of mid-infrared metamaterials.

Substrateless metamaterials at mid-infrared frequencies