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A method of using X-ray absorption spectroscopy (XAS) together with resolvedgrazing incidence geometry for depth profiling atomic, electronic, chemical ormagnetic local structures in thin films is presented. The quantitativedeconvolution of thickness-dependent spectral features is performed by fullyconsidering both scattering and absorption formalisms. Surface oxidation andlocal structural depth profiles in nanometric FePt films are determined,exemplifying the application of the method.

Depth dependent local structures in thin films unraveled by grazing incidence x-ray absorption spectroscopy