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Chemical-Vapor-Deposition (CVD) diamond films were prepared using a variationof nitrogen addition into the gas source admixture by a direct current CVDmethod. The influence of nitrogen addition on the crystallographic texture andgrain shape evolution in heteroepitaxial polycrystalline diamond films wasinvestigated using high-resolution electron backscattering diffraction(HR-EBSD) and X-ray diffraction (XRD). The analysis reveals that an addition of1.5% N2 to the CH4 gas flow leads to a strong enhancement of a {110} fibertexture. The phenomenon is discussed in terms of a competitive growth selectionmechanism.

Growth rate and EBSD texture analysis of nitrogen doped diamond films