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This paper presents a new electrostatic MEMS (MicroElectroMechanical System)based on a single high reliability totally free flexible membrane. Using fourelectrodes, this structure enables four states which allowed large deflections(4$\mu$m) with low actuation voltage (7,5V). This design presents also a goodcontact force and improve the restoring force of the structure. As an exampleof application, a Single Pole Double Throw (SPDT) for 24GHz applications, basedon this design, has been simulated.

A New Four States High Deflection Low Actuation Voltage Electrostatic Mems Switch for RF Applications