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A high quality factor (Q-factor) piezoelectric lead zirconat titanate (PZT)actuated single crystal silicon cantilever was proposed in this paper forresonant based ultra-sensitive mass detection. Energy dissipation fromintrinsic mechanical loss of the PZT film was successfully compressed byseparating the PZT actuator from resonant structure. Excellent Q-factor, whichis several times larger than conventional PZT cantilever, was achieved underboth atmospheric pressure and reduced pressures. For a 30 micrometer-wide 100micrometer-long cantilever, Q-factor was measured as high as 1113 and 7279under the pressure of 101.2 KPa and 35 Pa, respectively. Moreover, it was foundthat high-mode vibration can be realized by the cantilever for the pursuit ofgreat Q-factor, while support loss became significant because of the increasedvibration amplitude at the actuation point. An optimized structure usingnode-point actuation was suggested then to suppress corresponding energydissipation.

High Quality Factor Silicon Cantilever Driven by PZT Actuator for Resonant Based Mass Detection