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Modelling MEMS involves a variety of software tools that deal with theanalysis of complex geometrical structures and the assessment of variousinteractions among different energy domains and components. Moreover, the MEMSmarket is growing very fast, but surprisingly, there is a paucity of modellingand simulation methodology for precise performance verification of MEMSproducts in the nonlinear regime. For that reason, an efficient and rapidmodelling approach is proposed that meets the linear and nonlinear dynamicbehaviour of MEMS systems.

Modelling methodology of MEMS structures based on Cosserat theory