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A new technique was developed for studying the mechanical behavior ofnano-scale thin metal films on substrate is presented. The test structure wasdesigned on a novel "paddle" cantilever beam specimens with dimensions as fewhundred nanometers to less than 10 nanometers. This beam is in triangle shapein order to provide uniform plane strain distribution. Standard clean roomprocessing was used to prepare the paddle sample. The experiment can beoperated by using the electrostatic deflection on the paddle uniformdistributed stress cantilever beam and then measure the deposited thin metalfilm materials on top of it. A capacitance technique was used to measurement onthe other side of the deflected plate to measure its deflection with respect tothe force. The measured strain was converted through the capacitancemeasurement for the deflection of the cantilever. System performance on theresidual stress measurement of thin films are calculated with three differentforces on the "paddle" cantilever beam, including the force due to the film,compliance force and electrostatic force.

Process nano scale mechanical properties measurement of thin metal films using a novel paddle cantilever test structure