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MEMS technology has been developed rapidly in the last few years. More andmore special micro structures were discussed in several publications. However,all of the structures were produced by consist of the three fundamentalstructures, which included bridge, cantilever and membrane structures. Even themore complex structures were no exception. The cantilever with the property ofsimple design and easy fabrication among three kinds of fundamental structure,therefore, it was popular used in the design of MEMS device.

High Density out-of-Plane Microprobe Array