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In this paper an experimental validation of numerical approaches aimed topredict the coupled behaviour of microbeams for out-of-plane bending tests isperformed. This work completes a previous investigation concerning in planemicrobeams bending. Often out-of-plane microcantilevers and clamped-clampedmicrobeams suffer the presence of residual strain and stress, which affect thevalue of pull-in voltage. In case of microcantilever an accurate modellingincludes the effect of the initial curvature due to microfabrication. In doubleclamped microbeams a preloading applied by tensile stress is considered.Geometrical onlinearity caused by mechanical coupling between axial andflexural behaviour is detected and modelled. Experimental results demonstrate agood agreement between FEM approaches proposed and tests. A fairly fast andaccurate prediction of pull-in condition is performed, thus numerical modelscan be used to identify residual stress in microbridges by reverse analysisfrom the measured value of pull-in voltage.

RF-MEMS beam components : FEM modelling and experimental identification of pull-in in presence of residual stress