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The analytical models that predict thermal and mechanical responses ofmicroactuator have been developed. These models are based on electro thermaland thermo mechanical analysis of the microbeam. Also, Finite Element Analysis(FEA) is used to evaluate microactuator tip deflection. Analytical and FiniteElement results are compared with experimental results in literature and showgood agreement in low input voltages. A dimensional variation of beam lengths,beam lengths ratios and gap are introduced in analytical and FEA models toexplore microactuator performance. An electrothermally driven polysiliconmicroactuator similar to Pan's actuator architecture has been studied in thispaper. This microactuator generates deflection through asymmetric heating ofthe hot and cold polysilicon arms with different lengths. For thismicroactuator architecture, an optimal beam length ratio equal to 0.46 has beenobtained to achieve maximum tip deflection. . As it was expected, the resultsshow decreasing air gap increase microactuator tip deflection. It is also foundthat for microactuators with longer hot arms, microactuator tip deflections aremore sensitive to beam length ratios and air gap.

Geometrical Variation Analysis of an Electrothermally Driven Polysilicon Microactuator